Thin Film  
Cello PECVD
Sputter
PECVD Cello System Cambridge Nanotech ALD Nanofilm Sputter
Location: Cleanroom 1 (CR1) Location: Cleanroom 1 (CR1) Location: Cleanroom 1 (CR1)

Elite Sputter Sputter
Sputter (Elite Engineering) Denton Sputter Plasma Therm 790 PECVD
Location: Cleanroom 2 (CR2) Location: Cleanroom 2 (CR2) Location: Cleanroom 2 (CR2)

Nanofilm Sputter
Nanofilm Sputter (Use by CRP team Only)
Location: Cleanroom 2 (CR2)

Contact information:
To know more on the core facilities, please send email to n2fc@ntu.edu.sg
or click here to go N2FC homepage

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